X0206 3 2016-06-13 0 0001101302 ENTEGRIS INC ENTG 0001678021 Tison Stuart C/O ENTEGRIS, INC. 129 CONCORD ROAD BILLERICA MA 01821 0 1 0 0 Sr. V.P./G.M. Specialty Gas Common Stock 72543 D Employee Stock Option (Right to Buy) 5.40 2017-02-19 Common Stock 20630 D Employee Stock Option (Right to Buy) 8.76 2018-02-19 Common Stock 16310 D Employee Stock Option (Right to Buy) 9.27 2019-02-19 Common Stock 15497 D These shares include a total of 19,890 restricted stock units granted on February 12, 2013, February 11, 2014, February 10, 2015 and February 24, 2016 with restrictions that lapse as follows: (i) 8,281 shares vest on February 19, 2017, (ii) 5,751 shares vest on February 19, 2018, (iii) 3,809 shares vest on February 19, 2019, and (iv) 2,049 shares vest on February 19, 2020. This option is fully vested. /s/ Sue Lee, Attorney-In Fact for Stuart Tison 2016-06-23