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Major Accounting Policies (Details) - USD ($)
12 Months Ended
Sep. 30, 2017
Sep. 30, 2016
Sep. 30, 2015
Accounting Policies [Abstract]      
Before-Tax Share-Based Compensation Award Cost $ 8,300,000 $ 5,000,000 $ 4,700,000
Schedule of Equity Method Investments [Line Items]      
Allowance for doubtful accounts 1,000,000 $ 800,000  
Residual value of intangible assets $ 0    
Daido Air Products Electronics, Inc.      
Schedule of Equity Method Investments [Line Items]      
Equity method investment ownership, percentage   20.00%  
Versum Materials      
Schedule of Equity Method Investments [Line Items]      
Ownership in noncontrolling interest, percentage 74.00%