Acquisitions (Details) - Ultrapure $ in Thousands	Dec. 31, 2020 USD ($)
Business Acquisition [Line Items]
Acquisition costs	$ 216
Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Net	$ 8,743

Amount recognized for assets, including goodwill, in excess of (less than) the aggregate liabilities assumed.

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 20
-Section 50
-Paragraph 1
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=121647850&loc=d3e4845-128472

Name:	us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant