X0306 4 2022-03-01 0 0001597313 ViewRay, Inc. VRAY 0001527909 Drake Scott William C/O VIEWRAY, INC. 2 THERMO FISHER WAY OAKWOOD VILLAGE OH 44146 1 1 0 0 President & CEO Common Stock 2022-03-01 4 F 0 84787 4.14 D 3535436 D Common Stock 2022-03-01 4 F 0 26348 4.14 D 3509088 D Common Stock 2022-03-01 4 A 0 483091 0 A 3992179 D Common Stock 2022-03-02 4 F 0 37449 4.24 D 3954730 D Performance Units 0.0 2022-03-01 5 A 0 E 483091 0 A Common Stock 483091.0 483091 D Payment of tax liability by withholding securities incident to vesting of restricted stock units. The reported securities are RSUs that entitle the Reporting Person to receive one share of Common Stock per RSU upon vesting. A total of one-third of the shares subject to this grant become vested on each of the first three anniversaries of March 1, 2022, subject to the Reporting Person remaining a service provider through each such vesting date. Includes 3,519,185 shares granted as RSUs. As of the transaction date, 1,649,811 of the RSUs have vested. These performance share awards were issued at a 100% target and have a 3-year vest period and will vest in all or in part upon achievement of performance metrics. Any awards that have not been vested and released at the end of the 3-year period will be cancelled. /s/ Sanket Shah, Attorney-in-fact 2022-03-03