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Stock-based compensation (Tables)
6 Months Ended
Mar. 31, 2022
Share-based Payment Arrangement [Abstract]  
Schedule of Activity Under the Equity Incentive Plans
Activity under the equity incentive plans during the six months ended March 31, 2022 is summarized below:

(In thousands, except per share data)Shares
available
Options
outstanding
Weighted
average exercise price per share
Weighted average remaining contractual term
(years)
Aggregate
intrinsic
value
Outstanding at September 30, 2021
1,7283,132$27.15 7.3$251,343 
Additional shares authorized1,000
Stock options granted(214)21426.14
Stock options exercised(368)13.05
Stock options forfeited89(89)31.96
Restricted stock units granted(1,150)
Forfeiture of restricted stock units67
Shares withheld for payment of taxes62
Outstanding at March 31, 2022
1,5822,889$28.79 7.0$70,722 
Vested or expected to vest at March 31, 2022
2,889$28.79 7.0$70,722 
Vested and exercisable at March 31, 2022
1,739$21.00 6.4$51,266 
Schedule of Stock-Based Compensation Expenses
Total stock-based compensation expense recognized was as follows:

Three months ended
March 31,
Six months ended
March 31,
(in thousands)2022202120222021
Cost of revenues$1,241 $731 $2,119 $1,218 
Research and development4,8382,4278,8654,428
Selling, general and administrative16,2588,39429,42112,929
Total stock-based compensation$22,337 $11,552 $40,405 $18,575 
Schedule of Nonvested Performance Stock Units Activity
Activity under the PSUs during the six months ended March 31, 2022 is summarized below:
(in thousands, except per share data)Number of sharesWeighted average grant date fair valueWeighted average remaining contractual termAggregate intrinsic value
Outstanding at September 30, 202110 $3.59 2.3$1,016 
Performance stock units granted342 80.31 — — 
Performance stock units forfeited(1)3.34 — — 
Outstanding at March 31, 2022351 $81.21 2.1$17,328 
Vested or expected to vest and exercisable at March 31, 2022351 $81.21 2.1$17,328 
Schedule of Nonvested Restricted Stock Units Activity
Activity with respect to the Company’s restricted stock units during the six months ended March 31, 2022 was as follows:

(in thousands, except per share data)Number
of
Shares
Weighted
average
grant date
fair value
per share
Weighted
average
remaining
contractual
term (years)
Aggregate
Intrinsic
Value
Outstanding at September 30, 2021
698$73.27 2.7$74,613 
Restricted stock units granted80779.26— 
Restricted stock units vested(164)72.93— 
Restricted stock units forfeited(66)73.95— 
Outstanding at March 31, 2022
1,275$85.41 3.2$62,971 
Expected to vest at March 31, 2022
1,275$85.41 3.2$62,971 
Summary of Stock Option Valuation Assumptions The number of shares reserved for issuance as at March 31, 2022 is as follows:
(In thousands)Shares
available
Outstanding at September 30, 2021
355
Additional shares authorized249
Shares issued during the period(50)
Outstanding at March 31, 2022
554