Segment Information - Schedule of Product Revenue from Customers by Geographic Region (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2022	Mar. 31, 2021
Revenues From External Customers And Long Lived Assets [Line Items]
Revenue	$ 16,028	$ 14,556
China
Revenues From External Customers And Long Lived Assets [Line Items]
Revenue	11,257	10,159
Taiwan
Revenues From External Customers And Long Lived Assets [Line Items]
Revenue	2,244	2,414
South Korea
Revenues From External Customers And Long Lived Assets [Line Items]
Revenue	1,470	1,642
Japan
Revenues From External Customers And Long Lived Assets [Line Items]
Revenue	638	172
Other
Revenues From External Customers And Long Lived Assets [Line Items]
Revenue	$ 419	$ 169