X0306 4 2013-03-26 0 0000021535 COHU INC COHU 0001509513 Muller Luis A 12367 CROSTHWAITE CIRCLE POWAY CA 92064 0 1 0 0 President, Semi Equip Group Common Stock 65385 D Restricted Stock Units 2013-03-26 4 A 0 34045 0.00 A 34045 D Performance Stock Units 2013-03-26 4 A 0 24895 0.00 A 24895 D Employee Stock Option (Right to Buy) 9.44 2013-03-26 4 A 0 65056 9.44 A 2014-03-26 2023-03-26 Common Stock 65056 65056 D Number of shares includes 46,393 Restricted Stock Units (RSU) (excluding the impact of shares that will be withheld to cover tax obligations) previously reported that in the future will be converted on a one-for-one basis into shares of Cohu, Inc. Common Stock, immediately upon vesting which vesting is scheduled to occur in annual installments (assuming continued employment). Each restricted stock unit (RSU) represents a contingent right to receive one share of Cohu, Inc. Common Stock upon vesting. The RSU vests in four equal annual installments beginning March 26, 2014 (assuming continued employment). Represents performance shares (restricted stock units) that will be converted on a one-for-one basis into shares of Cohu, Inc. common stock upon vesting. These performance shares will vest only after the achievement of specified performance goals. Provided such goals are achieved, vesting is scheduled to occur no earlier than three equal annual installments beginning March 26, 2014 (subject to continued employment through each vest date). The number of shares shown is the target award level. The actual number of shares that may vest ranges from 0% to 150% of the target amount, depending on achievement of specified performance goals. The option vests in four equal installments beginning on March 26, 2014 (assuming continued employment). Jeffrey D. Jones (Attorney-in-Fact) 2013-03-28