Stock-Based Compensation - Share-based compensation expense (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2024	Mar. 31, 2023
Stock-based compensation
Share-based compensation expense	$ 5,265	$ 3,902
Cost of product revenue
Stock-based compensation
Share-based compensation expense	281	187
Cost of service and other revenue
Stock-based compensation
Share-based compensation expense	308	350
Research and development
Stock-based compensation
Share-based compensation expense	543	370
Selling, general, and administrative
Stock-based compensation
Share-based compensation expense	4,133	$ 2,995
Restricted stock units and stock options
Stock-based compensation
Total unrecognized compensation cost related to unvested stock awards	$ 56,000
Period of recognition of unrecognized compensation cost	3 years 1 month 6 days