Stock-based compensation - Share-based compensation expense (Details) - USD ($) $ in Thousands	3 Months Ended
Mar. 31, 2022	Mar. 31, 2021
Stock-based compensation
Share-based compensation expense	$ 3,827	$ 3,386
Cost of product revenue
Stock-based compensation
Share-based compensation expense	88	90
Cost of service and other revenue
Stock-based compensation
Share-based compensation expense	166	110
Research and development
Stock-based compensation
Share-based compensation expense	398	399
General and administrative
Stock-based compensation
Share-based compensation expense	3,175	$ 2,787
Restricted stock units and stock options
Stock-based compensation
Total unrecognized compensation cost related to unvested stock awards	$ 42,800
Period of recognition of unrecognized compensation cost	2 years 10 months 24 days

Amount of expense for award under share-based payment arrangement. Excludes amount capitalized.

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
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Amount of cost to be recognized for nonvested award under share-based payment arrangement. Excludes share and unit options.

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