X0303 4 2010-11-10 0 0001039399 FORMFACTOR INC FORM 0001492413 DeLateur Richard 7005 SOUTHFRONT ROAD LIVERMORE CA 94551 0 1 0 0 SR VP, CFO Non-Qualified Stock Option (right to buy) 10.3 2010-11-10 4 A 0 80000 0 A 2017-11-10 Common Stock 80000 80000 D The Stock Option is granted pursuant to the Issuer's 2002 Equity Incentive Plan and vests over 3 years, with 33% vesting on November 10, 2011 and the remainder vesting in equal monthly installments over the following two years. If the reporting person's employment is terminated for any reason before an applicable Vesting Date, all options that have not yet vested shall be forfeited without consideration, except as provided in the change of control severance agreement and any other agreements regarding option vesting and exercisability between the reporting person and Issuer, which agreements or form agreements are filed with the SEC. THE ATTACHED CONFIRMING STATEMENT GRANTING THE ATTORNEY-IN-FACT THE AUTHORITY TO EXECUTE AND FILE THIS FORM 4 HAS BEEN FILED WITH THE U.S. SECURITIES AND EXCHANGE COMMISSION. By: /s/ Stuart L Merkadeau, Attorney-in-Fact For: Richard DeLateur 2010-11-11