Inventories (Tables)

3 Months Ended

Mar. 31, 2018

Inventories

Schedule of current inventories

	December 31,		March 31,
	2017		2018
Raw materials	$	17,876	$	22,428
Work in process		38,629		50,231
Finished goods		1,434		1,785
Total inventories	$	57,939	$	74,444