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Subsequent Events (Details) - USD ($)
1 Months Ended 3 Months Ended 9 Months Ended 24 Months Ended
Oct. 31, 2018
Sep. 30, 2018
Sep. 30, 2017
Sep. 30, 2018
Sep. 30, 2017
Dec. 31, 2019
Subsequent events            
Research and development expense   $ 6,453,000 $ 6,420,000 $ 19,706,000 $ 19,236,000  
Global Foundries | Joint Development Agreement            
Subsequent events            
Research and development expense   $ 1,600,000 $ 850,000 $ 5,900,000 $ 4,100,000  
Subsequent Events | Global Foundries | Joint Development Agreement            
Subsequent events            
Additional extension related to an SOW that extends beyond the extended term 3 months          
Subsequent Events | Global Foundries | Joint Development Agreement | Forecast | Maximum            
Subsequent events            
Research and development expense           $ 5,800,000