Assets Held for Sale and Long-lived Assets (Details Textual) $ in Thousands	1 Months Ended	12 Months Ended
	Sep. 30, 2018 USD ($) ft²	Dec. 31, 2019 USD ($)	Dec. 31, 2018 USD ($)
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Net book value			$ 236
Purchase price for property		$ 64	2,280
Malaysia equipment [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Net book value		188	131
Gain on sale of asset		302	2,900
Total consideration amount		$ 490
U.S. equipment and consumable assets [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Net book value			$ 1,600
Batavia [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Sale of square foot | ft²	134,400
Net book value	$ 5,900
Sale price for property	6,700
Realized net proceeds after payment of real estate taxes, brokerage and legal fees, transfer taxes and other expenses	6,400
Gain on sale of asset	504
Purchase price for property	$ 2,300