Summary of Significant Accounting Policies (Details Textual) $ / shares in Units, $ in Thousands		3 Months Ended		9 Months Ended		12 Months Ended
	Jun. 10, 2019 $ / shares shares	Sep. 30, 2019 USD ($) ft² shares	Sep. 30, 2018 USD ($) shares	Sep. 30, 2019 USD ($) ft² shares	Sep. 30, 2018 USD ($) shares	Dec. 31, 2018 USD ($)
Summary of Significant Accounting Policies (Textual)
Asset impairment charges
Revenue recognized			$ 56,000		$ 56,000
Total value of the contract						4,700
Property purchased				64	$ 2,280
Government contract remaining payment less than amount		$ 200,000		$ 200,000
Options exercisable | shares		32,839	26,812	32,839	26,812
Accrued warranty reserve		$ 3,000		$ 3,000		$ 8,000
Consumable assets the amount				$ 76,000
Gain on sale of equipment		$ 125,000
Repurchase of common stock, shares | shares	12,818
Repurchase of common stock, per share | $ / shares	$ 8.12
Malaysia [Member]
Summary of Significant Accounting Policies (Textual)
Area of land | ft²		65,000		65,000
Net book value of furnaces			$ 131,000		$ 131,000
Batavia [Member]
Summary of Significant Accounting Policies (Textual)
Net book value			1,600		1,600
Selling price of property					6,700
Consumable assets the amount					2,200
Net proceeds from sale of facility in Batavia					6,400
Net book value of property sold			$ 5,900		5,900
Gain on sale of facility in Batavia					$ 504,000