Segment Information (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended		9 Months Ended
	Sep. 30, 2012	Sep. 30, 2011	Sep. 30, 2012	Sep. 30, 2011
Summary of revenue by geographic region
Total Revenue	$ 19,942	$ 33,637	$ 47,152	$ 114,635
Korea [Member]
Summary of revenue by geographic region
Total Revenue	6,929	20,324	9,332	37,309
United States [Member]
Summary of revenue by geographic region
Total Revenue	4,256	4,240	8,842	9,251
France [Member]
Summary of revenue by geographic region
Total Revenue	2,245		8,482	356
Australia [Member]
Summary of revenue by geographic region
Total Revenue	4,702		8,430	14
Taiwan [Member]
Summary of revenue by geographic region
Total Revenue	417	4,208	5,657	49,846
China [Member]
Summary of revenue by geographic region
Total Revenue	921	575	3,501	3,533
Japan [Member]
Summary of revenue by geographic region
Total Revenue	152	2,612	492	11,115
Other [Member]
Summary of revenue by geographic region
Total Revenue	$ 320	$ 1,678	$ 2,416	$ 3,211