Segment Information (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended		6 Months Ended
	Jun. 30, 2012	Jun. 30, 2011	Jun. 30, 2012	Jun. 30, 2011
Summary of revenue by geographic region
Total Revenue	$ 17,003	$ 43,028	$ 27,210	$ 80,998
France [Member]
Summary of revenue by geographic region
Total Revenue	3,486	246	6,237	356
Taiwan [Member]
Summary of revenue by geographic region
Total Revenue	3,547	22,196	5,240	45,638
United States [Member]
Summary of revenue by geographic region
Total Revenue	2,461	3,100	4,586	5,011
Australia [Member]
Summary of revenue by geographic region
Total Revenue	2,612	14	3,728	14
China [Member]
Summary of revenue by geographic region
Total Revenue	1,729	2,064	2,580	2,958
Korea [Member]
Summary of revenue by geographic region
Total Revenue	2,403	9,572	2,403	16,985
Japan [Member]
Summary of revenue by geographic region
Total Revenue	73	4,863	340	8,503
Other [Member]
Summary of revenue by geographic region
Total Revenue	$ 692	$ 973	$ 2,096	$ 1,533