X0303 4 2009-02-10 0 0001094392 RUDOLPH TECHNOLOGIES INC RTEC 0001410170 MORATH CHRISTOPHER J C/O RUDOLPH TECHNOLOGIES, INC. ONE RUDOLPH ROAD, PO BOX 1000 FLANDERS NJ 07836 0 0 0 1 VP, Operations, MBU Common Stock - Performance-based Restricted Stock Unit 2009-02-10 4 A 0 4000 0 A 4152 D Common Stock - Restricted Stock Unit 2009-02-10 4 A 0 4000 0 A 9800 D Each Performance-based Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock. 20% of the shares of Common Stock subject to the Performance - based Restricted Stock Unit vest each year on the grant date; contingent upon the reporting person's having satisfied certain performance criteria approved by the Compensation Committee of the registrant's Board of Directors, and contingent upon the reporting person's continued employment with the registrant. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting. The amount of shares indicated in direct beneficial ownership include an adjustment to the shares granted on May 27th, 2008 to reflect 9.5% of the performance criteria being met. Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock. 20% of the shares of Common Stock subject to the Restricted Stock Unit vest each year on the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting. /s/ Christopher J. Morath 2009-02-12