Collaboration Agreements - Additional Information (Details) $ in Thousands	1 Months Ended		3 Months Ended		9 Months Ended
	Jan. 31, 2020 shares	Aug. 31, 2017 USD ($)	Sep. 30, 2020 USD ($)	Sep. 30, 2019 USD ($)	Sep. 30, 2020 USD ($)	Sep. 30, 2019 USD ($)
Collaborative Arrangement and Arrangement Other than Collaborative [Line Items]
Revenue			$ 31,845	$ 30,604	$ 81,054	$ 88,637
Collaborative Arrangement | Lam Research Corporation
Collaborative Arrangement and Arrangement Other than Collaborative [Line Items]
Revenue			1,400	$ 4,000	4,300	$ 13,200
Maximum amount of royalties payable (ratio)		3
Customer deposits			$ 500		$ 500
Number of warrants exercised | shares	1,000,000.0
Collaborative Arrangement | Lam Research Corporation | Maximum
Collaborative Arrangement and Arrangement Other than Collaborative [Line Items]
Revenue		$ 50,000
Number of warrants, outstanding | shares	407,247