Collaboration Agreements - Additional Information (Details) $ in Thousands	1 Months Ended		3 Months Ended		6 Months Ended
	Jan. 31, 2020 shares	Aug. 31, 2017 USD ($)	Jun. 30, 2020 USD ($)	Jun. 30, 2019 USD ($)	Jun. 30, 2020 USD ($)	Jun. 30, 2019 USD ($)
Collaborative Arrangement and Arrangement Other than Collaborative [Line Items]
Revenue			$ 22,604	$ 30,345	$ 49,209	$ 58,033
Collaborative Arrangement | Lam Research Corporation
Collaborative Arrangement and Arrangement Other than Collaborative [Line Items]
Revenue			1,100	$ 4,400	2,900	9,200
Maximum amount of royalties payable (ratio)		3
Proceeds from collaborators						2,700
Customer deposits			$ 1,900		1,900
Number of warrants exercised | shares	1,000,000.0
Collaborative Arrangement | Lam Research Corporation | Maximum
Collaborative Arrangement and Arrangement Other than Collaborative [Line Items]
Revenue		$ 50,000
Number of warrants, outstanding | shares	407,247
Collaborative Arrangement | Celgene Corporation
Collaborative Arrangement and Arrangement Other than Collaborative [Line Items]
Revenue					$ 4,400
Proceeds from collaborators						$ 200