XML 56 R42.htm IDEA: XBRL DOCUMENT v3.7.0.1
Subsequent Event (Detail) - Collaborative Arrangement [Member] - Lam Research Corporation [Member] - Subsequent Event [Member]
$ / shares in Units, shares in Millions, $ in Millions
Aug. 09, 2017
USD ($)
employee
$ / shares
shares
Subsequent Event [Line Items]  
License and Services Revenue | $ $ 50.0
Maximum Amount Of Royalties Payable, Ratio To License And Service Revenue 3
Reimbursement Of Counterparty Costs, Maximum Number Of Employees | employee 10
Class of Warrant or Right, Outstanding (in shares) | shares 1.0
Exercise Price Of Common Stock Warrants (in dollars per share) | $ / shares $ 16.75