CONSOLIDATED STATEMENTS OF CASH FLOWS - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2022	Mar. 31, 2021
Operating Activities
Net loss	$ (15,673)	$ (10,057)
Adjustments to reconcile net loss to net cash used in operating activities:
Stock-based compensation	4,258	925
Depreciation and amortization	1,442	1,149
Non-cash lease expense	139	17
Non-cash interest expense	1,150	0
Changes in operating assets and liabilities:
Accounts receivable	810	435
Inventories	16	39
Prepaid expenses and other current assets, deposits and other assets	(2,317)	(4,273)
Accounts payable, accrued expenses and long-term liabilities	(2,285)	4,600
Net cash used in operating activities	(12,460)	(7,165)
Investing Activities
Acquisitions of property, plant and equipment	(31,218)	(4,630)
Acquisition of patent portfolio	(10)	0
Proceeds from sale and maturity of marketable securities	71,082	0
Purchase of marketable securities	(31,993)	0
Net cash used in investing activities	7,861	(4,630)
Financing Activities
Debt and equity offering costs	0	(31,683)
Proceeds from issuance of common stock and common stock warrants	0	489,373
Proceeds from exercise of warrants	3	1,117
Net settlement of common stock under stock plans	(220)	0
Payment of loans payable - other	(103)	(27)
Payment of finance lease liabilities	(34)	0
Net cash provided by financing activities	(354)	458,780
Net increase (decrease) in cash and cash equivalents	(4,953)	446,985
Cash, cash equivalents and restricted cash at beginning of period	136,033	78,338
Cash, cash equivalents and restricted cash at end of period	131,080	525,323
Schedule of cash, cash equivalents and restricted cash
Cash and cash equivalents	44,626	525,323
Restricted cash (current)	16,216	0
Long-term restricted cash	70,238	0
Total cash, cash equivalents and restricted cash	131,080	525,323
Supplemental disclosures of cash and non-cash investing and financing transactions
Cash paid for interest	2	3
Cash paid for interest capitalized to construction in progress	516	0
Non-cash interest capitalized to construction in progress	1	0
Non-cash purchase of property, plant and equipment	7,530	999
Right-of-use asset purchased with operating lease	$ 0	$ 1,562