Consolidated Statements of Operations (Parentheticals) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2021	Dec. 31, 2020	Dec. 31, 2019
Noncash compensation expense	$ 9,874	$ 2,125	$ 1,349
Cost of Goods Sold [Member]
Noncash compensation expense	40	0	0
Research and Development Expense [Member]
Noncash compensation expense	2,000	600	300
Selling, General and Administrative Expenses [Member]
Noncash compensation expense	$ 7,800	$ 1,500	$ 1,100