CONSOLIDATED STATEMENTS OF CASH FLOWS $ in Thousands	12 Months Ended
	Dec. 31, 2022 USD ($)	Dec. 31, 2021 USD ($)
Operating Activities
Net Loss	$ (98,007)	$ (59,203)
Adjustments to reconcile net loss to net cash used in operating activities:
Impairment loss	24,749	0
Loss on disposal of assets	499	5,137
(Gain) on forgiveness of SBA Loans	0	(641)
Stock-based compensation	17,419	9,874
Depreciation and amortization	7,887	5,128
Amortization of marketable securities premium	2,723	5,029
Other noncash (income) expense	877	89
Changes in operating assets and liabilities:
Accounts receivable	502	(257)
Inventories	(2,004)	(259)
Prepaid expenses and other current assets, deposits and other assets	(10,893)	(12,897)
Accounts payable, accrued expenses and long-term liabilities	3,635	(271)
Net cash used in operating activities	(52,613)	(48,271)
Investing Activities
Acquisitions of property, plant and equipment	(75,775)	(56,770)
Acquisition of patent portfolio	(10)	0
Proceeds from sale and maturity of marketable securities	299,581	79,574
Purchase of patents and license	0	(9,170)
Purchase of marketable securities	(130,402)	(424,992)
Net cash provided by (used in) investing activities	93,394	(411,358)
Financing Activities
Proceeds from issuance of long-term debt	0	68,995
Debt and equity offering costs	(10,993)	(34,955)
Proceeds from issuance of common stock and common stock warrants	150,000	489,373
Proceeds from exercise of warrants	3	1,121
Net settlement of common stock under stock plans	(286)	(7,041)
Payment of loans payable - other	(150)	(154)
Payment of finance lease liabilities	(12)	(15)
Net cash provided by financing activities	138,562	517,324
Net increase in cash and cash equivalents	179,343	57,695
Cash, cash equivalents and restricted cash at beginning of period	136,033	78,338
Cash, cash equivalents and restricted cash at end of period	315,376	136,033
Schedule of cash, cash equivalents and restricted cash
Cash and cash equivalents	237,125	40,833
Restricted cash (current)	1,032	25,032
Long-term restricted cash	77,219	70,168
Total cash, cash equivalents and restricted cash	315,376	136,033
Supplemental disclosures of cash and non-cash investing and financing transactions
Cash paid for interest, net of amounts capitalized	522	(806)
Non-cash purchase of property, plant and equipment	13,837	20,287
Right-of-use asset purchased with financing leases	0	245
Right-of-use asset purchased with operating lease	0	1,611
Non-cash interest capitalized to construction in progress	$ 0	$ 1,125