CONSOLIDATED STATEMENTS OF CASH FLOWS - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Sep. 30, 2022	Sep. 30, 2021	Sep. 30, 2022	Sep. 30, 2021
Operating Activities
Net loss	$ (43,786)	$ (14,380)	$ (72,620)	$ (42,690)
Adjustments to reconcile net loss to net cash used in operating activities:
Impairment loss	24,749	0	24,749	0
Loss on disposal of assets	0	183	0	5,137
(Gain) on forgiveness of SBA Loans	0	0	0	(641)
Stock-based compensation			12,624	5,823
Depreciation and amortization			4,452	3,572
Amortization of marketable securities premium			2,755	0
Other noncash (income) expense			(153)	77
Changes in operating assets and liabilities:
Accounts receivable			626	14
Inventories			(338)	150
Prepaid expenses and other current assets, deposits and other assets			(8,445)	(4,459)
Accounts payable, accrued expenses and long-term liabilities			(420)	4,324
Net cash used in operating activities			(36,770)	(28,693)
Investing Activities
Acquisitions of property, plant and equipment			(68,535)	(30,955)
Acquisition of patent portfolio			(10)	0
Proceeds from sale and maturity of marketable securities			243,817	34,332
Purchase of patents and license			0	(9,000)
Purchase of marketable securities			(130,402)	(422,362)
Net cash provided by (used in) investing activities			44,870	(427,985)
Financing Activities
Proceeds from issuance of 2021 Bonds			0	68,995
Debt and equity offering costs			(10,993)	(34,919)
Proceeds from issuance of common stock and common stock warrants			150,000	487,549
Proceeds from exercise of warrants			3	1,119
Net settlement of common stock under stock plans			(285)	(5,137)
Payment of loans payable - other			(112)	(98)
Payment of finance lease liabilities			(4,316)	(2,996)
Net cash provided by financing activities			134,297	514,513
Net increase (decrease) in cash and cash equivalents			142,397	57,835
Cash, cash equivalents and restricted cash at beginning of period			136,033	78,338
Cash, cash equivalents and restricted cash at end of period	278,430	136,173	278,430	136,173
Schedule of cash, cash equivalents and restricted cash
Cash and cash equivalents	200,564	16,201	200,564	16,201
Restricted cash (current)	1,024	49,804	1,024	49,804
Long-term restricted cash	76,842	70,168	76,842	70,168
Total cash, cash equivalents and restricted cash	$ 278,430	$ 136,173	278,430	136,173
Supplemental disclosures of cash and non-cash investing and financing transactions
Cash paid for interest, net of amounts capitalized			770	11
Non-cash purchase of property, plant and equipment			11,136	12,164
Right-of-use asset purchased with financing leases			834	28,416
Right-of-use asset purchased with operating lease			$ 0	$ 1,611