X0306 4 2013-08-09 0 0000864559 CASCADE MICROTECH INC CSCD 0001389680 Ahlgren Debbora 9100 SW GEMINI DRIVE BEAVERTON OR 97008 0 1 0 0 Vice President, Marketing Common Stock 2013-08-09 4 M 0 7500 0.00 A 7500 D Common Stock 2013-08-09 4 F 0 2682 7.50 D 4818 D Restricted Stock Units 0.00 2013-08-09 4 M 0 7500 0.0 D 2013-08-09 Common Stock 7500 22500 D These Restricted Stock Units do not carry a conversion price. Per the terms of the agreement and using aggregate market value sufficient to pay applicable taxes, shares were withheld and surrendered to the Company to satisfy tax withholding obligation in connection with the vesting of Restricted Stock Units. Each Restricted Stock Unit represents a right to receive one share of Cascade Microtech Inc. Common Stock upon vesting. Restricted Stock Units cliff vest annually on the anniversary date of the award in four annual installments. Restricted Stock Units have no expiration date. Madelaine Salas by Power of Attorney 2013-08-12