144 0001325550 XXXXXXXX LIVE 0000704532 ONTO INNOVATION INC. 001-39110 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200 Plisinski Michael P Officer common Fidelity Brokerage Services LLC

245 Summer Street Boston MA 02110

35000 7671808.07 49391299 01/21/2025 NYSE Common 11/09/2018 Compensation Issuer N 11954 11/09/2018 N/A Common 10/01/2016 Compensation Issuer N 773 10/01/2016 N/A Common 02/22/2016 Compensation Issuer N 1220 02/22/2016 N/A Common 02/19/2016 Compensation Issuer N 2640 02/19/2016 N/A Common 01/31/2016 Compensation Issuer N 1547 01/31/2016 N/A Common 01/28/2016 Compensation Issuer N 2168 01/28/2016 N/A Common 01/26/2016 Compensation Issuer N 1394 01/26/2016 N/A Common 01/25/2016 Compensation Issuer N 1650 01/25/2016 N/A Common 10/01/2015 Compensation Issuer N 773 10/01/2015 N/A Common 02/22/2015 Compensation Issuer N 1205 02/22/2015 N/A Common 02/20/2015 Compensation Issuer N 722 02/20/2015 N/A Common 01/31/2015 Compensation Issuer N 750 01/31/2015 N/A Common 01/26/2015 Compensation Issuer N 1393 01/26/2015 N/A Common 01/25/2015 Compensation Issuer N 1648 01/25/2015 N/A Common 02/22/2014 Compensation Issuer N 1005 02/22/2014 N/A Common 02/10/2014 Compensation Issuer N 4158 02/10/2014 N/A N Michael Plisinski c/o ONTO INNOVATION INC.

16 JONSPIN ROAD WILMINGTON MA 01887

Common Stock 01/14/2025 20000 4003917.08 Michael Plisinski c/o ONTO INNOVATION INC.

16 JONSPIN ROAD, WILMINGTON MA 01887

Common Stock 01/16/2025 30000 6337183.73 01/21/2025 08/26/2024 /s/ Audrey Skillern as a duly authorized representative of Fidelity Brokerage Services LLC, as attorney-in-fact for Michael Plisinski