144 0001325550 XXXXXXXX LIVE 0000704532 ONTO INNOVATION INC. 001-39110 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200 Plisinski Michael P Officer common Fidelity Brokerage Services LLC

245 Summer Street Boston MA 02110

20000 4003917.08 49391299 01/14/2025 NYSE Common 02/08/2021 RSU Issuer N 3266 02/08/2021 N/A Common 02/07/2021 RSU Issuer N 5751 02/07/2021 N/A Common 02/06/2021 RSU Issuer N 3627 02/06/2021 N/A Common 01/27/2021 RSU Issuer N 4600 01/27/2021 N/A Common 02/08/2020 RSU Issuer N 2756 02/08/2020 N/A Y 01/14/2025 08/26/2024 /s/ Audrey Skillern as a duly authorized representative of Fidelity Brokerage Services LLC, as attorney-in-fact for Michael Plisinski