X0303 4 2010-08-04 1 0000864559 CASCADE MICROTECH INC CSCD 0001323953 RGM Capital, LLC 6621 WILLOW PARK DRIVE SUITE ONE NAPLES FL 34109 0 0 0 1 Shareholder 0001413431 Moses Robert G RGM CAPITAL, LLC 6621 WILLOW PARK DRIVE SUITE ONE NAPLES FL 34109 0 0 0 1 Shareholder Common Stock, $0.01 par value per share 1432584 I By private limited partnerships and a separately managed account RGM Capital, LLC 2010-08-24 Robert G. Moses on behalf of RGM Capital, LLC 2010-08-24