X0202 4 2005-01-27 0 0001094392 RUDOLPH TECHNOLOGIES INC rtec 0001315848 Kurdock John C/O RUDOLPH TECHNOLOGIES, INC. ONE RUDOLPH ROAD, PO BOX 1000 FLANDERS NJ 07836 0 1 0 0 VP Manufacturing Restricted Stock Unit 2005-01-27 4 A 0 14500 0 A Common Stock 14500 14500 D Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock. 20% of the shares of Common Stock subject to the Restricted Stock Unit vest each year on the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting. /s/ John Kurdock 2005-01-31