X0303 4/A 2009-12-30 2010-01-04 0 0000704532 NANOMETRICS INC NANO 0001296648 Coates Norman V C/O NANOMETRICS, INC. 1550 BUCKEYE DRIVE MILPITAS CA 95035 1 0 1 0 0001399229 Vincent J Coates Separate Property Trust C/O NANOMETRICS, INC. 1550 BUCKEYE DRIVE MILPITAS CA 95035 0 0 1 0 0001490414 COATES STELLA N C/O NANOMETRICS, INC. 1550 BUCKEYE DRIVE MILPITAS CA 95035 0 0 1 0 Common Stock 2009-12-30 4 S 0 94051 11.00 D 2732460 I See footnote Shares held of record by the Vincent J. Coates Separate Property Trust, U/D/T dated August 7, 1981, for which Norman Coates and Stella Coates act as co-trustees. This amended filing reflects the restatement of the original filing to: (a) remove Vincent J. Coates as a reporting person; (b) add Norman V. Coates as a reporting person; and (c) add Stella N. Coates as a reporting person. /s/ Timothy Stultz, Attorney-in-Fact 2011-04-21