Consolidated Balance Sheets (Parentheticals) - USD ($) $ in Thousands	Dec. 31, 2021	Dec. 31, 2020
Trade, allowance for credit losses	$ 90	$ 597
Property, plant and equipment, net	2,294,973	2,099,046
Construction-in-process	721,483	479,315
Operating leases right of use	19,357	16,347
Finance leases right of use	$ 6,414	$ 11,633
Common stock, par value (in dollars per share)	$ 0.001	$ 0.001
Common stock, shares authorized (in shares)	200,000,000	200,000,000
Common stock, shares issued (in shares)	56,056,450	55,983,259
Common stock, shares outstanding (in shares)	56,056,450	55,983,259
Senior Secured Notes [Member]
Deferred financing costs	$ 11,304	$ 13,887
Senior Unsecured Bonds [Member]
Deferred financing costs	3,659	3,436
Variable Interest Entity, Primary Beneficiary [Member]
Property, plant and equipment, net	2,159,696	1,978,220
Construction-in-process	366,924	198,812
Operating leases right of use	7,825	4,712
Finance leases right of use	$ 192	$ 7,001