X0306 4 2021-11-17 0 0000704532 ONTO INNOVATION INC. ONTO 0001275868 ROGGE KAREN M C/O ONTO INNOVATION INC. 16 JONSPIN ROAD WILMINGTON MA 01887 1 0 0 0 Common Stock 2021-11-17 4 A 0 850 0.0 A 850 D Each Restricted Stock Unit represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the Restricted Stock Unit vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting. By: /s/ Robert A. Koch For: Karen M. Rogge 2021-11-18