X0407 4 2023-05-09 0 0000704532 ONTO INNOVATION INC. ONTO 0001275868 ROGGE KAREN M C/O ONTO INNOVATION INC. 16 JONSPIN ROAD WILMINGTON MA 01887 1 0 0 0 0 Common Stock 2023-05-09 4 A 0 2200 0.0 A 5150 D The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. 100% of the shares of Common Stock subject to the RSU vest one (1) year from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting. Exhibit List: Exhibit 24 - Power of Attorney By: Mark R. Slicer For: Karen M. Rogge 2023-05-11