Consolidated leverage ratio.

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Fixed charge coverage ratio.

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Percentage of original outstanding principal balance as quarterly principal payment.

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Percentage of undrawn and unexpired amount of letter of credit as fronting fee.

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Percentage points added to the reference rate to compute the variable rate on the debt instrument.

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Amount, before unamortized (discount) premium and debt issuance costs, of long-term debt. Includes, but is not limited to, notes payable, bonds payable, commercial loans, mortgage loans, convertible debt, subordinated debt and other types of debt.

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Face (par) amount of debt instrument at time of issuance.

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Description of the frequency of periodic payments (monthly, quarterly, annual).

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Contractual interest rate for funds borrowed, under the debt agreement.

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Description of the interest rate as being fixed or variable, and, if variable, identification of the index or rate on which the interest rate is based and the number of points or percentage added to that index or rate to set the rate, and other pertinent information, such as frequency of rate resets.

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Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

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Date when the debt instrument is scheduled to be fully repaid, in YYYY-MM-DD format.

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The carrying value as of the balance sheet date of the current and noncurrent portions of long-term obligations drawn from a line of credit, which is a bank's commitment to make loans up to a specific amount. Examples of items that might be included in the application of this element may consist of letters of credit, standby letters of credit, and revolving credit arrangements, under which borrowings can be made up to a maximum amount as of any point in time conditional on satisfaction of specified terms before, as of and after the date of drawdowns on the line. Includes short-term obligations that would normally be classified as current liabilities but for which (a) postbalance sheet date issuance of a long term obligation to refinance the short term obligation on a long term basis, or (b) the enterprise has entered into a financing agreement that clearly permits the enterprise to refinance the short-term obligation on a long term basis and the following conditions are met (1) the agreement does not expire within 1 year and is not cancelable by the lender except for violation of an objectively determinable provision, (2) no violation exists at the BS date, and (3) the lender has entered into the financing agreement is expected to be financially capable of honoring the agreement.

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The fee, expressed as a percentage of the line of credit facility, for the line of credit facility regardless of whether the facility has been used.

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Date the credit facility terminates, in YYYY-MM-DD format.

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The effective interest rate during the reporting period.

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Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.

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Amount of borrowing capacity currently available under the credit facility (current borrowing capacity less the amount of borrowings outstanding).

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Amount, after unamortized (discount) premium and debt issuance costs, of long-term debt. Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.

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The cash inflow from amounts received from issuance of long-term debt that is wholly or partially secured by collateral. Excludes proceeds from tax exempt secured debt.

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Carrying value as of the balance sheet date, including the current and noncurrent portions, of collateralized debt obligations (with maturities initially due after one year or beyond the operating cycle, if longer). Such obligations include mortgage loans, chattel loans, and any other borrowings secured by assets of the borrower.

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The remaining balance of debt issuance expenses that were capitalized and are being amortized against income over the lives of the respective bond issues. This does not include the amounts capitalized as part of the cost of the utility plant or asset.

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Borrowing Arrangements - Additional Information (Detail) € in Millions, ₩ in Billions			1 Months Ended	12 Months Ended
	Dec. 31, 2021 USD ($)	Mar. 31, 2021 USD ($)	Aug. 31, 2018 USD ($)	Dec. 31, 2021 USD ($)	Dec. 31, 2021 KRW (₩)	Dec. 31, 2021 EUR (€)
Debt Instrument [Line Items]
Cash borrowed for acquisition and refinancing		$ 355,000,000.0
Outstanding amount of borrowing classified as long-term debt	$ 565,400,000			$ 565,400,000
Ham-Let [Member]
Debt Instrument [Line Items]
Debt instrument, interest rate, stated percentage	1.00%			1.00%	1.00%	1.00%
Outstanding debt	$ 8,900,000			$ 8,900,000
Bank Debt [Member]
Debt Instrument [Line Items]
Unamortized debt issuance costs	13,400,000			13,400,000
Outstanding amount of borrowing classified as long-term debt	555,100,000			$ 555,100,000
Cincos Xian Clean Technology Ltd [Member] \| China [Member] \| Bank Debt [Member]
Debt Instrument [Line Items]
Term loan, maturity date				Sep. 23, 2022
Debt instrument, principal amount	$ 1,900,000			$ 1,900,000
Debt instrument, interest rate, stated percentage	4.10%			4.10%	4.10%	4.10%
Outstanding debt	$ 1,400,000			$ 1,400,000
Minimum [Member]
Debt Instrument [Line Items]
Fixed charge coverage ratio				1.25%
Maximum [Member]
Debt Instrument [Line Items]
Consolidated leverage ratio				3.75%
Term Loan Credit Facility [Member] \| Barclays Bank PLC [Member]
Debt Instrument [Line Items]
Cash borrowed for acquisition and refinancing		$ 272,800,000	$ 350,000,000.0
Outstanding term loan	555,100,000		$ 355,000,000.0	$ 555,100,000
Term loan, maturity date			Aug. 27, 2025
Percentage of original outstanding principal balance as quarterly principal payment			0.625%
Debt instrument, frequency of periodic payment				The Term Loan has a maturity date of August 27, 2025, with monthly interest payments in arrears, quarterly principal payments of 0.625% of the outstanding principal balance as of March 31, 2021, with the remaining principal paid upon maturity.
Unamortized debt issuance costs	$ 13,400,000			$ 13,400,000
Description of interest rate term				Under the Credit Facility, the Company may elect that the Term Loan bear interest at a rate per annum equal to either (a) “ABR” (as defined in the Credit Agreement), plus the applicable margin or (b) the “Eurodollar Rate” (as defined in the Credit Agreement), based on LIBOR, plus the applicable margin. The applicable margin for the Term Loan is equal to a rate per annum to either (i) at any time that the Company’s corporate family rating is Ba3 (with a stable outlook) or higher from Moody’s and BB- (with a stable outlook) or higher from S&P, (x) 3.50% for such Eurodollar term loans and (y) 2.50% for such ABR term loans or (ii) at all other times, (x) 3.75% for such Eurodollar term loans and (y) 2.75% for such ABR term loans. Interest on the Term Loan is payable on (1) in the case of such ABR term loans, the last day of each calendar quarter and (2) in the case of such Eurodollar term loans, the last day of each relevant interest period and, in the case of any interest period longer than three months, on each successive date three months after the first day of such interest period. On March 29, 2021, the Company elected that the Term Loan outstanding as of March 31,2021, accrue interest based on the “Eurodollar Rate” for an initial interest period of one month. Pursuant to the Second Amendment to the Credit Agreement, the Credit Facility contains customary LIBOR replacement provisions in the event LIBOR is discontinued.
Term Loan Credit Facility [Member] \| Barclays Bank PLC [Member] \| Eurodollar [Member] \| Minimum [Member]
Debt Instrument [Line Items]
Debt instrument variable interest rate		3.50%
Term Loan Credit Facility [Member] \| Barclays Bank PLC [Member] \| Eurodollar [Member] \| Maximum [Member]
Debt Instrument [Line Items]
Debt instrument variable interest rate		3.75%
Term Loan Credit Facility [Member] \| Barclays Bank PLC [Member] \| ABR [Member] \| Minimum [Member]
Debt Instrument [Line Items]
Debt instrument variable interest rate	2.50%
Term Loan Credit Facility [Member] \| Barclays Bank PLC [Member] \| ABR [Member] \| Maximum [Member]
Debt Instrument [Line Items]
Debt instrument variable interest rate	2.75%
Term Loan Credit Facility [Member] \| Barclays Bank PLC [Member] \| London Interbank Offered Rate (LIBOR) [Member]
Debt Instrument [Line Items]
Debt instrument variable interest rate				3.90%
Revolving Credit Facility [Member] \| China [Member]
Debt Instrument [Line Items]
Outstanding amount under credit facility	$ 0			$ 0
Revolving Credit Facility [Member] \| China [Member] \| Bank Debt [Member]
Debt Instrument [Line Items]
Remaining available commitments	1,000,000.0			1,000,000.0
Revolving Credit Facility [Member] \| Czech Republic [Member] \| Bank Debt [Member]
Debt Instrument [Line Items]
Initial available commitment	6,800,000			6,800,000		€ 6.0
Outstanding amount under credit facility	0			0
Revolving Credit Facility [Member] \| United States [Member] \| Bank Debt [Member]
Debt Instrument [Line Items]
Remaining available commitments	112,600,000			112,600,000
Revolving Credit Facility [Member] \| Czech Republic [Member] \| Bank Debt [Member]
Debt Instrument [Line Items]
Remaining available commitments	6,800,000			6,800,000
Revolving Credit Facility [Member] \| South Korea [Member] \| Bank Debt [Member]
Debt Instrument [Line Items]
Remaining available commitments	500,000			500,000
Revolving Credit Facility [Member] \| Cincos Xian Clean Technology Ltd [Member] \| China [Member]
Debt Instrument [Line Items]
Initial available commitment	1,000,000.0			$ 1,000,000.0
Maturity date				Sep. 23, 2022
Interest rate				2.00%
Revolving Credit Facility [Member] \| Cincos Xian Clean Technology Ltd [Member] \| China [Member] \| Bank Debt [Member]
Debt Instrument [Line Items]
Outstanding debt	0			$ 0
Revolving Credit Facility [Member] \| Cinos Co., Ltd [Member] \| Korea [Member]
Debt Instrument [Line Items]
Initial available commitment	500,000			$ 500,000	₩ 600.0
Interest rate				2.90%
Revolving Credit Facility [Member] \| Barclays Bank PLC [Member]
Debt Instrument [Line Items]
Initial available commitment			$ 65,000,000.0
Maturity date			Aug. 27, 2023
Commitment fee percentage			0.25%
Letter of Credit Facility [Member] \| Barclays Bank PLC [Member]
Debt Instrument [Line Items]
Initial available commitment			$ 50,000,000.0
Maturity date			Aug. 27, 2023
Commitment fee percentage			2.50%
Percentage of undrawn and unexpired amount of letter of credit as fronting fee			0.125%
Outstanding amount under credit facility	2,400,000			$ 2,400,000
Remaining available commitments	$ 47,600,000			$ 47,600,000