X0201 3 2003-11-05 0 0000319201 KLA TENCOR CORP KLAC 0001269921 YARBRO STAN C/O KLA-TENCOR CORPORATION 160 RIO ROBLES SAN JOSE CA 95130 0 1 0 0 Group VP, Field Operations Non-Qualified Stock Option (right to buy) 26.25 2005-11-10 2010-11-10 Common Stock 3938 D Non-Qualified Stock Option (right to buy) 29.31 2002-10-02 2011-10-02 Common Stock 14250 D Non-Qualified Stock Option (right to buy) 32.75 2002-04-04 2011-04-04 Common Stock 4667 D Non-Qualified Stock Option (right to buy) 33.75 2000-10-27 2009-10-27 Common Stock 334 D Non-Qualified Stock Option (right to buy) 34.67 2003-11-08 2013-01-28 Common Stock 20000 D Non-Qualified Stock Option (right to buy) 37.05 2003-11-08 2012-11-08 Common Stock 10000 D Non-Qualified Stock Option (right to buy) 44.6875 2000-08-13 2010-08-13 Common Stock 3243 D Non-Qualified Stock Option (right to buy) 51.229 2003-11-08 2013-07-30 Common Stock 10000 D Non-Qualified Stock Option (right to buy) 53.86 2004-10-27 2013-10-27 Common Stock 18000 D By: Stuart J. Nichols For: Stan K. Yarbro 2003-11-14