<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>3/A</documentType>

    <periodOfReport>2004-12-14</periodOfReport>

    <dateOfOriginalSubmission>2004-12-15</dateOfOriginalSubmission>

    <noSecuritiesOwned>0</noSecuritiesOwned>

    <issuer>
        <issuerCik>0000864559</issuerCik>
        <issuerName>CASCADE MICROTECH INC</issuerName>
        <issuerTradingSymbol>CSCD</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001268517</rptOwnerCik>
            <rptOwnerName>BARNES KEITH</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1></rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity></rptOwnerCity>
            <rptOwnerState></rptOwnerState>
            <rptOwnerZipCode></rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <derivativeTable>
        <derivativeHolding>
            <securityTitle>
                <value>Series B Preferred Stock</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <footnoteId id="F1"/>
            </conversionOrExercisePrice>
            <exerciseDate>
                <footnoteId id="F1"/>
            </exerciseDate>
            <expirationDate>
                <footnoteId id="F1"/>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>505000</value>
                    <footnoteId id="F2"/>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>I</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value>By Electroglas, Inc.</value>
                </natureOfOwnership>
            </ownershipNature>
        </derivativeHolding>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">Each share of Series B Preferred Stock converts into one share of common stock upon the closing of the Issuer's initial public offering.</footnote>
        <footnote id="F2">Mr. Barnes is Chairman and Chief Executive Officer of Electroglas, Inc.  Accordingly Mr. Barnes may be deemed to be the beneficial owner of the 505,000 shares of Series B Preferred Stock held by Electroglas, Inc.</footnote>
    </footnotes>

    <remarks>A Form 3 was filed on December 15, 2004 on behalf of Electroglas, Inc.  The report should have been filed on behalf of Mr. Keith Barnes, who as Chairman and Chief Executive Officer of Electroglas, Inc., may be deemed the beneficial owner of shares owned by Electroglas, Inc.</remarks>

    <ownerSignature>
        <signatureName>Madelaine Salas, by power of attorney</signatureName>
        <signatureDate>2004-12-20</signatureDate>
    </ownerSignature>
</ownershipDocument>

