X0202 4/A 2005-02-18 2005-02-22 1 0001094392 RUDOLPH TECHNOLOGIES INC RTEC 0001262607 SOBEL ELIOT M ONE RUDOLPH RD PO BOX 1000 FLANDERS NJ 07836 0 1 0 0 Vice President, Manufacturing The reporting person previously filed a Form 4 on February 22, 2005, and in such Form 4 did not check the "Exit Box". This amendment is being filed solely to check the "Exit Box" as the reporting person is not subject to Section 16 of the Securities Act of 1934 and has not been subject to Section 16 since December 9, 2004. No other amendments are being made through this filing to the Form 4 previously filed on February 22, 2005. By: /s/ Debora B. Tomlinson For: Eliot M. Sobel 2005-02-23