X0303 4 2010-05-20 0 0001039399 FORMFACTOR INC FORM 0001253573 MAIER LOTHAR 7005 SOUTHFRONT ROAD LIVERMORE CA 94551 1 0 0 0 Restricted Stock Units 0 2010-05-20 4 A 0 6000 0 A Common Stock 6000 12000 D Restricted Stock Units vest in 12 equal monthly installments with the vesting dates beginning June 20, 2010 and ending May 20, 2011. Settlement of vested Units into common stock will occur on the earlier of May 20, 2011 or the date the reporting person's engagement with Issuer is terminated (or on the first market trading day in an open trading window under Issuer's insider trading policy if the applicable date is not a market trading day in an open trading window). If the reporting person's engagement with Issuer is terminated for any reason, all Restricted Stock Units that have not yet vested shall be forfeited without consideration, except as provided in Section 9.5 of the Plan and any other agreements regarding award vesting and exercisability between the reporting person and Issuer, which agreements or form agreements are filed with the SEC. THE CONFIRMING STATEMENT GRANTING THE ATTORNEY-IN-FACT THE AUTHORITY TO EXECUTE AND FILE THIS FORM 4 HAS BEEN PREVIOUSLY FILED WITH THE U.S. SECURITIES AND EXCHANGE COMMISSION. By: \s\ Stuart L Merkadeau, Attorney-in-Fact For: Lothar Maier 2010-05-21