X0306 4 2016-01-31 0 0000864559 CASCADE MICROTECH INC CSCD 0001252039 BURGER MICHAEL D 9100 SW GEMINI DRIVE BEAVERTON OR 97008 0 1 0 0 President and CEO Common Stock 2016-01-31 4 M 0 4750 0.00 A 74802 D Common Stock 2016-01-31 4 F 0 1979 15.8500 D 68073 D Restricted Stock Unit 0.00 2016-01-31 4 M 0 4750 0.0 D 2016-01-31 Common Stock 4750 4750 D These Restricted Stock Units do not carry a conversion price. Per the terms of the agreement and using aggregate market value sufficient to pay applicable taxes, shares were withheld and surrendered to the Company to satisfy tax withholding obligation in connection with the vesting of Restricted Stock Units. Each Restricted Stock Unit represents a right to receive one share of Cascade Microtech Inc. Common Stock upon vesting. Restricted Stock Units cliff vest annually on the anniversary date of the award in four annual installments. Restricted Stock Units have no expiration date. James Nias, by power of attorney 2016-02-01