X0306 4 2014-02-07 0 0000864559 CASCADE MICROTECH INC CSCD 0001252039 BURGER MICHAEL D 9100 SW GEMINI DRIVE BEAVERTON OR 97008 0 1 0 0 President & CEO Common Stock 53140 D Stock Option 9.61 2014-02-07 4 A 0 60000 9.61 A 2024-02-07 Common Stock 60000 60000 D Restricted Stock Unit 0.00 2014-02-07 4 A 0 15000 0.0 A Common Stock 15000 15000 D Each Stock Option represents a right to receive one share of Cascade Microtech Inc. Common Stock upon vesting. Providing that the individual continues to hold the status of Employee or member of Board of Directors, then Stock Options cliff vest and become exercisable in four equal annual installments on the anniversary date of the grant. These Restricted Stock Units do not carry a conversion price. Each Restricted Stock Unit represents a right to receive one share of Cascade Microtech Inc. Common Stock upon vesting. Provided that the individual continues to hold the status of Employee or member of Board of Directors, then Restricted Stock Units cliff vest in four equal annual installments on the anniversary date of the award. Restricted Stock Units have no expiration date. Madelaine Salas, by power of attorney 2014-02-11