X0202 4 2007-02-01 0 0001094392 RUDOLPH TECHNOLOGIES INC RTEC 0001244761 KOCH ROBERT ALAN C/O RUDOLPH TECHNOLOGIES, INC. ONE RUDOLPH ROAD, PO BOX 1000 FLANDERS NJ 07836 0 1 0 0 VP & General Counsel Common Stock - Restricted Stock Unit 2007-02-01 4 A 0 4000 0 A 10400 D Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock. 20% of the shares of Common Stock subject to the Restricted Stock Unit vest each year on the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting. /s/ Robert A. Koch 2007-02-05