X0303 4 2009-07-21 0 0000909791 ULTRATECH INC UTEK 0001234481 TIMMINS RICK 3050 ZANKER ROAD SAN JOSE CA 95134 1 0 0 0 Common Stock 2009-07-21 4 A 0 5000 0 A 27500 D This represents an award of restricted stock units under the Issuer's 1993 Stock Option/Stock Issuance Plan in an exempt transaction under Rule 16b-3(d). Each unit will entitle the Reporting Person to one share of the Issuer's common stock upon vesting. The units will vest in full upon the earlier of (i) the Reporting Person's completion of one year of Board service measured from the award date and (ii) the Reporting Person's continuation in Board service through the day immediately prior to the Issuer's next Annual Stockholder's meeting. Includes 5,000 shares subject to the reported restricted stock unit award, which will vest and become issuable as described in footnote (1) above. By: Bruce R. Wright, Attorney-in-fact For: Rick Timmins 2009-07-22