X0306 4 2022-08-12 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001230508 FAUBERT RICHARD J C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 1 0 0 0 Common Stock 2022-08-12 4 S 0 15000 76.28 D 33625 D The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $76.20 to $76.32, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price. Of the shares held as of August 12, 2022, 2,689 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture. Lynnette C. Fallon, as attorney in fact for Richard J. Faubert 2022-08-12