X0202 4 2004-06-03 0000909791 ULTRATECH INC UTEK 0001229494 KONIDARIS NICHOLAS C/O ULTRATECH, INC. 3050 ZANKER ROAD SAN JOSE CA 95134 1 0 0 0 Employee Stock Option (Right to Buy) 14.60 2004-06-03 4 A 0 8000 A 2004-06-03 2014-06-02 Common Stock 8000 8000 D Option is immediately exercisable, but underlying shares are subject to repurchase by the Company at cost should optionee cease to provide service to the Company prior to vesting in such shares. The Company's right of repurchase shall lapse as for 100% of the shares upon completion of one (1) year of Board Service measured from the date of grant. The option was granted in an exempt transaction pursuant to SEC Rule 16b-3(d). Bruce R. Wright, Attorney-in-Fact for Nicholas Konidaris. 2004-06-03