X0303 4 2010-06-01 0 0000726514 ELECTRO SCIENTIFIC INDUSTRIES INC ESIO 0001229494 KONIDARIS NICHOLAS 13900 NW SCIENCE PARK DRIVE PORTLAND OR 97229 1 1 0 0 President and CEO Common Stock 2010-06-01 4 A 0 896 0 A 308511 D Common Stock 2010-06-01 4 F 0 5990 12.48 D 302521 D Shares awarded in excess of original Performance-based Restricted Stock Units granted on July 26, 2007 and reported on Form 4. Excess earned based on actual performance achieved. Payment of tax liability by delivering shares incident to the vesting of restricted stock units in accordance with Rule 16b-3. By: Kerry L Mustoe For: Nicholas Konidaris 2010-06-03