X0202 4 2007-08-13 0 0000726514 ELECTRO SCIENTIFIC INDUSTRIES INC ESIO 0001229494 KONIDARIS NICHOLAS 13900 NW SCIENCE PARK DR. PORTLAND OR 97229 0 1 0 0 President and CEO Common Stock 2007-08-13 4 F 0 7984 23.2 D 78572 D Common Stock 2007-08-13 4 M 0 20000 0 A 98572 D Common Stock 2007-08-13 4 A 0 2520 0 A 101092 D Performance Restricted Stock Units Grant 0 2007-08-13 4 M 0 20000 0 D 2007-08-13 2007-07-12 Common Stock 20000 0 D Payment of tax liability by delivering shares incident to the vesting of restricted stock units in accordance with Rule 16b-3. Shares awarded in excess of original performance based restricted stock unit grant reported as a derivative on 7/13/04. Excess earned based on performance criteria met. Performance-Based Restricted Stock Units cliff vested after three years following grant date if certain levels of performance are achieved vs. a peer group of companies. The actual vesting date is the completion of the annual audit. The annual audit was complete on 8/13/07. By: Kerry L. Mustoe For: Nicholas Konidaris 2007-08-15