X0303 4 2010-08-25 0 0001094392 RUDOLPH TECHNOLOGIES INC RTEC 0001225870 GREIG THOMAS G C/O LIBERTY PARTNERS 1370 AVENUE OF THE AMERICAS NEW YORK NY 10019 1 0 0 0 Common Stock 2010-08-25 4 P 0 5400 8.22 A 61900 D Common Stock 2010-08-26 4 P 0 4600 8.28 A 66500 D It has come to the attention of the Issuer and the Reporting Person that the transactions reported herein may have inadvertently triggered a disgorgement obligation under Section 16(b) of the Securities Exchange Act of 1934, as amended. The Reporting Person has made full payment to the Issuer in satisfaction of any such disgorgement obligation. By: Robert A. Koch For: Thomas G. Greig 2010-08-27