Entegris, Inc.

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Smith Corp. 831865209 183324.00000000 NS USD 9954493.20000000 0.520858177396 Long EC CORP US N 1 N N N Cintas Corp. N/A Cintas Corp. 172908105 31064.00000000 NS USD 9882079.68000000 0.517069217648 Long EC CORP US N 1 N N N 2021-03-02 Invesco Exchange-Traded Fund Trust Sheri Morris Sheri Morris Vice President XXXX