X0303 4 2011-05-24 0001101302 ENTEGRIS INC ENTG 0001208109 GRAVES GREGORY B 4613 DREXEL AVE. S. EDINA MN 55424 0 1 0 0 EXEC. V.P. & CFO Common Stock 2011-05-24 4 M 0 7500 5.90 A 146188 D Common Stock 2011-05-24 4 S 0 7500 8.4326 D 138688 D Common Stock 2011-05-24 4 M 0 25820 5.40 A 164508 D Common Stock 2011-05-24 4 S 0 25820 8.415 D 138688 D Employee Stock Option (Right to Buy) 5.90 2011-05-24 4 M 0 7500 0 D 2006-10-15 2012-10-15 Common Stock 7500 0 D Employee Stock Option (Right to Buy) 5.40 2011-05-24 4 M 0 25820 0 D 2017-02-19 Common Stock 25820 51638 D The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Securities & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $8.445 to $8.423, inclusive. The reporting person undertakes to provide Entegris, Inc. any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Securities & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $8.40 to $8.435, inclusive. The reporting person undertakes to provide Entegris, Inc. any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. This option vests in three equal annual installments on February 19, 2011, February 19, 2012 and February 19, 2013. These options were awarded pursuant to a stock option plan that provides for the award of options in consideration of services as an employee. Peter W. Walcott, Attorney-In-Fact for Gregory B. Graves 2011-05-25