X0303 4 2009-12-23 0001101302 ENTEGRIS INC ENTG 0001208109 GRAVES GREGORY B 4613 DREXEL AVE. S. EDINA MN 55424 0 1 0 0 Exec VP & CFO Common Stock 2009-12-23 4 S 0 500 5.34 D 246914 D Common Stock 2009-12-23 4 S 0 800 5.35 D 246114 D Common Stock 2009-12-23 4 S 0 600 5.36 D 245514 D Common Stock 2009-12-23 4 S 0 1100 5.37 D 244414 D Common Stock 2009-12-23 4 S 0 7500 5.38 D 236914 D Common Stock 2009-12-23 4 S 0 4100 5.39 D 232814 D Common Stock 2009-12-23 4 S 0 2100 5.40 D 230714 D Common Stock 2009-12-23 4 S 0 1900 5.41 D 228814 D Common Stock 2009-12-23 4 S 0 3700 5.42 D 225114 D Common Stock 2009-12-23 4 S 0 1500 5.43 D 223614 D Common Stock 2009-12-23 4 S 0 700 5.44 D 5.44 D Common Stock 2009-12-23 4 S 0 600 5.45 D 222314 D Common Stock 2009-12-23 4 S 0 1812 5.46 D 220502 D Common Stock 2009-12-23 4 S 0 1900 5.47 D 218602 D These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on November 30, 2009. Peter W. Walcott, Attorney-in-Fact for Gregory B. Graves 2009-12-28